Introduction to Scanning Microwave Microscopy Application Note Introduction

Introduction Mapping materials physical properties, such as impedance, capacitance, dielectric constants, dopant density, etc., at the nanoscale is of great interest to both materials and semiconductor industries. Such mapping, however, usually is not as straightforward as topography imaging because, in many cases, these properties are related to buried structures not directly shown on the surface. It takes innovative approaches to “see through” and meanwhile achieve sufficient sensitivity and resolution.